FilTech Quartz Crystal Sensors

Fil-Tech crystal sensors are available in two standard frequencies, 5MHz and 6MHz, and have developed two major electrode series — Gold and Silver-Aluminum Alloy — to meet various coating process requirements. Gold electrode sensors are suitable for monitoring the deposition of low-stress metal films such as aluminum, gold, and silver. The Silver-Aluminum Alloy electrode sensors are specifically designed for high-stress materials like chromium, titanium, nickel, as well as optical dielectric materials including SiO₂ and MgF₂, effectively suppressing frequency hopping and significantly extending sensor lifespan under demanding process conditions. The product line is fully compatible with mainstream coating equipment from Inficon, Balzers, Sloan, ULVAC, and more, with precise mounting dimensions for direct replacement of original sensors. This helps users maintain coating quality while effectively reducing consumable procurement costs. With consistent quality performance and broad applicability, Filtech crystal sensors have become a trusted choice for users across optical coating, semiconductor, and surface treatment industries worldwide.