Part No:SA6AD12
The SA6AD12 is a high-performance 6MHz AT-CUT quartz crystal sensor with a diameter of 12.42mm, specifically designed for precision thin-film deposition monitoring systems. This model features an advanced **dual-anchor silver-aluminum alloy electrode (2-Anchor Ag/Al)** process, perfectly combining silver's excellent conductivity with aluminum's chemical stability. Compared to traditional single-sided or full-cover electrodes, the SA6AD12's dual-anchor structure provides more secure electrical contact points, and its highly oxidation-resistant alloy layer effectively withstands ion bombardment in high-vacuum environments. Its ultra-low resonant resistance of ≤15Ω ensures that the sensor maintains extremely high oscillation sensitivity even under heavy loads, making it an ideal choice for precision optical coating and semiconductor process monitoring where cost-effectiveness and stability are paramount.


The SA6AD12 is an industrial-grade 6MHz monitoring crystal sensor, manufactured with a 12.42mm standard AT-CUT quartz substrate, specifically developed for PVD deposition processes compatible with 12mm sensor probes. The core advantage of this model lies in its 'dual-anchor' (2-Anchor) silver-aluminum alloy electrode design, which optimizes electrode-to-contact-spring matching while ensuring efficient signal transmission. With a center frequency of 5.988MHz and stringent tolerance control of ±8KHz, it delivers longer service life and more accurate rate feedback than conventional crystal sensors in complex multi-layer film deposition processes.
The SA6AD12 employs an innovative silver-aluminum alloy electrode solution, specifically optimized to address the contact reliability issues that traditional electrodes often encounter in compact 12mm probes. The silver content ensures extremely low resonant resistance (≤15Ω), allowing the crystal to oscillate easily even under high-load conditions; the addition of aluminum forms a dense protective film on the electrode surface, significantly enhancing oxidation and aging resistance in high-vacuum environments. The 'dual-anchor' design not only ensures electrical connection redundancy but also reduces mechanical stress on the crystal's central area through optimized electrode distribution, thereby minimizing frequency shifts during the coating process.
With its precise diameter control of 12.42mm (±0.03mm) and AT-CUT fabrication process, the SA6AD12 demonstrates excellent frequency-temperature stability over its typical operating range of 25°C to 75°C. Its 6MHz fundamental frequency configuration strikes an ideal balance between measurement sensitivity and film-loading capacity. With a storage life of up to 6 months and strict humidity control standards, it is an ideal choice for various high-value thin-film monitoring applications. Whether paired with imported or domestic 12mm crystal-control systems, the SA6AD12 consistently improves production yield through its combined advantages of low impedance, corrosion resistance, and signal stability.
| Part No | SA6AD12 |
| Nominal Frequency | 6.000MHz |
| Center Frequency | 5.988MHz |
| Frequency Tolerance | ±8KHz@25°C |
| Wafer Diameter | 12.42mm ± 0.03mm |
| Resonance Resistance | ≤15Ω |
| Crystal Cutting | AT-CUT |
| Electrode Material | Silver/Aluminum |
| Operating Temperature | 25°C ~ 75°C |
| Electrode Appearance | Dual-Anchor Electrode 2 anchors |
| Storage Temperature | -20°C ~ +85°C |
| Storage Humidity | Relative Humidity 30~50% |
| Storage Life | 6 months |
The dual-anchor electrode design enhances mechanical engagement stability between the electrode and the probe spring by providing two specific contact anchor points at the edge of the quartz disc. This is particularly important for the smaller 12mm crystal sensor, as it effectively prevents signal flickering caused by probe aging or weakened spring tension, while also providing dual signal paths to reduce contact resistance.
12.42mm is the standard precision tolerance dimension (corresponding to 0.489 inches) for industrial-grade 12mm sensors. This specification is specifically designed to fit certain older models from Shincron, Optorun, and specific high-precision laboratory sensor probes, ensuring minimal radial clearance after installation to prevent displacement during vibration.
The SA6AD12 is fully compatible with all 6MHz crystal controllers. The 5.988MHz initial frequency is pre-compensated to account for the initial mass-loading effect after installation. This allows the crystal sensor to operate in the most linear response range when coating actually begins, thereby providing longer monitoring life and lower initial noise compared to standard 6.000MHz nominal crystal sensors.
The silver-aluminum alloy electrode combines silver's flexibility with aluminum's hardness. When depositing high-stress films (such as fluorides or certain metal oxides), this alloy layer offers more buffering capacity than pure gold electrodes, effectively absorbing tensile or compressive stresses from the film and preventing delamination (peeling) between the electrode layer and the quartz substrate, thus suppressing 'frequency jumping' phenomena.
Lower resonant resistance (R1) indicates a higher Q-factor (quality factor) for the crystal sensor, meaning a higher useful-signal-to-noise ratio in signal processing. As film thickness increases during later coating stages, resistance gradually rises; keeping the initial resistance within 15Ω significantly delays the onset of 'Crystal Fail' alarms, supporting thicker single-layer depositions.
Absolutely. If your equipment uses 12mm crystal sensors and you encounter premature failure, signal jumps, or rapidly rising resistance during coating processes, the SA6AD12's dual-anchor design and alloy technology provide superior physical stability and chemical corrosion resistance, making it an ideal solution for upgrading process stability.
Although the silver-aluminum alloy electrode offers improved oxidation resistance, it is still recommended to store the product in an environment with temperatures between -20°C and +85°C and relative humidity between 30% and 50%. After opening the original vacuum-sealed packaging, it is advisable to store the sensors in a desiccator or nitrogen cabinet to ensure optimal performance throughout the 6-month shelf life.