6MHz Gold Electrode Crystals
Part No：AC6AD14
Gold electrodes offer low contact resistance, high chemical stability, and ease of deposition, making them suitable for thickness monitoring of low-stress materials such as gold, silver, and copper. However, due to their relatively high rigidity, gold electrodes tend to transfer film stress to the quartz substrate, which may cause frequency jumps and compromise monitoring stability.
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14mm-6MHz-Gold-Plated Precision Monitoring Crystal: Engineered for High-Standard Vacuum Coating Processes
The AC6AD14 is a 6MHz quartz crystal specifically designed for high-precision vacuum coating processes. Featuring an industry-standard 14mm wafer diameter and a high-performance gold-plated electrode, this product leverages the exceptional chemical stability and ultra-low contact resistance of the gold layer, making it the preferred solution for monitoring the deposition of gold, silver, copper, and other precious metals. Compared to standard crystals, the AC6AD14 delivers outstanding frequency performance during extended high-frequency operations, serving as your critical assurance for achieving high-accuracy thickness monitoring.
Process Advantages of Gold-Plated Electrodes
Superior Electrical Conductivity: The gold-plated electrode minimizes signal attenuation, ensuring high data acquisition sensitivity at the 6MHz resonant frequency—particularly essential for precision processes highly sensitive to deposition rate fluctuations. Excellent Chemical Stability: As a noble metal coating, the gold electrode effectively resists oxidation and environmental corrosion, maintaining a stable resonance resistance (≤15Ω) even after multiple evaporation cycles, thereby preventing invalid frequency jumps. Optimized Stress Management: Through our proprietary electrode anchor design (2 anchors), the AC6AD14 optimizes stress transfer efficiency onto the quartz substrate, significantly mitigating film stress jitter during long-term monitoring and substantially enhancing the reliability of OLED and semiconductor coating processes.
Why Choose the 6MHz 14mm Series?
The 6MHz frequency configuration achieves a perfect balance between sensitivity and crystal lifespan. Its 14mm diameter design is widely compatible with mainstream single/dual sensor head monitors available on the market (such as standard INFICON models). Whether for semiconductor metal interconnect layer processes, precision optical coating, or micro/nanoscale research growth monitoring, the AC6AD14 provides consistent monitoring performance from start to finish.
Product Specifications
| Part No | AC6AD14 |
| Nominal Frequency | 6.000MHz |
| Center Frequency | 5.987MHz |
| Frequency Tolerance | ±7KHz@25°C |
| Wafer Diameter | 13.97mm ± 0.02mm |
| Resonance Resistance | ≤15Ω |
| Crystal Cutting | AT-CUT |
| Electrode Material | Gold(Au) / Chrome(Cr) |
| Operating Temperature | 25°C ~ 75°C |
| Electrode Appearance | 2 anchors |
| Storage Temperature | -20°C ~ +85°C |
| Storage Humidity | RH 30~50% |
| Storage Life | Unlimited storage life |
applications of the quartz monitor crystal
Find answers to the most frequently asked questions .
Yes, the AC6AD14 is designed for full compatibility with standard 14mm sensor heads, including those from INFICON and other major brands.
Gold electrodes offer superior chemical stability and lower contact resistance, making them ideal for long-term, high-frequency monitoring applications.
6MHz is the industry-standard frequency that provides an optimal balance between sensitivity and service life. Compared to 5MHz, it offers higher thickness resolution; compared to 10MHz, it provides greater stability during thick film deposition and is less prone to crystal activity dips, making it well-suited for most metal thin-film monitoring.
Gold electrodes provide exceptional chemical inertness, effectively preventing oxidation during long-term monitoring. Furthermore, their extremely low resistance ensures a high signal-to-noise ratio at the 6MHz resonant frequency, minimizing frequency drift caused by electrode degradation.
Always wear anti-static gloves during installation to prevent oil contamination on the electrode surface. Ensure the two anchors are correctly aligned within the sensor head slots. If frequent frequency jumping occurs, it is usually due to poor contact or excessive film stress; please check the installation tension or replace the crystal if the deposited film is too thick.
The AC6AD14 crystal features a highly stable design with an unlimited theoretical shelf life. However, for optimal performance, we recommend storage in a dry environment with 30-50% RH. Since the electrode surface is sensitive to organic contaminants, always keep it in its original vacuum or anti-static packaging and avoid exposure to volatile organic compounds before use.
The operating temperature range for this model is 25°C to 75°C. In vacuum coating, the primary challenge is radiant heat. If your evaporation source generates intense heat, we recommend utilizing a water-cooled sensor head to ensure the crystal remains within its optimal operating range, thereby preventing frequency distortion due to thermal expansion.